Search Results       Your search for [author]Lucovsky, G.,et.al. returned 1 record.           Low-temperature deposition of hudrogenated amorphous silicon (a-Si:H): control of polyhydride incorporation and its effects on thin film properties. by Lucovsky, G.,et.al.; Subject: Amorphous silicon; Reactive magnetron sputtering (RMS); Thin film.          Add to Book Cart Relevance: 25.64%