Search Results       Your search for [subject]Arrhenius equation returned 1 record.           Parametric and kinetic study of silicon nitride film deposition on silicon wafer by low pressure chemical vapor deposition (LPCVD) method. by Velasco, Angelito A.; 2002. Subject: Silicon nitride; Chemical vapor deposition; Arrhenius equation.          Add to Book Cart Relevance: 21.10%