Search Results       Your search for [subject]Chemical mechanical planarization returned 1 record.           Coagulation-flocculation of combined chemical mechanical polishing wastewater and flouride-containing wastewater from a semiconductor manufacturer. by De Luna, Mark Daniel G.; 2007. Subject: Factory and trade waste -- Purification -- Coagulation; Factory and trade waste -- Purification -- Flocculation; Chemical mechanical planarization.          Add to Book Cart Relevance: 17.76%