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Face up
returned
1
record.
Difference between the face up and face to face methods in AsH3 capless annealing of LEC-GaAs
.
by
Nishitsuji, Mitsuru
;
Subject:
GaAs
;
AsH3/H2
;
Capless annealing
;
Face up
;
Face to face
;
Carrier profile
;
DLTS
;
LPE-B level
;
H2 atmosphere
.
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