Search Results       Your search for [subject]Generation of ion returned 1 record.           Growth of indium aluminum nitride films using reactive RF-magnetron sputtering. by Ceniza, Claude R.; 2012. Subject: Engineering; Materials science; Sputtering; Indium aluminum nitride films; Collision processes; Generation of ion; Thin film growth process; RF-magnetron sputtering.          Add to Book Cart Relevance: 16.62%