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  Analytics Difference between the face up and face to face methods in AsH3 capless annealing of LEC-GaAs.

by Nishitsuji, Mitsuru;

Subject: GaAs; AsH3/H2; Capless annealing; Face up; Face to face; Carrier profile; DLTS; LPE-B level; H2 atmosphere.

 
     
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