Search Results       Your search for [subject]Microlithography -- Congresses returned 1 record.           Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy _ Microcircuit Engineering 91 (1991 : Rome, Italy). Amsterdam: Elsevier, 1992. Subject: Integrated circuits -- Very large scale integration -- Design and construction -- Congresses; Microlithography -- Congresses.          Add to Book Cart Relevance: 16.13%