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Plasma etching
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Parametric study of the reactive ion etching of silicon
.
by
Sotto, Romelyn H.
; 2008.
Subject:
Semiconductors -- Etching
;
Silicons -- Etching
;
Plasma etching
.
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Relevance: 22.63%
Principles of plasma discharges and materials processing
.
by
Lieberman, M. A., ( Michael A.)
; New York: Wiley, 1994.
Subject:
Plasma dynamics
;
Thin films -- Surfaces
;
Plasma etching
;
Plasma chemistry
.
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Relevance: 22.52%
Plasma deposition, treatment, and etching of polymers
.
by
D'Agostino, Riccardo
; Boston: Academic Press, 1990.
Subject:
Plasma engineering
;
Plasma etching
;
Plasma polymerization
;
Polymers
.
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Relevance: 21.83%
Plasma etching : an introduction
.
by
Manos, Dennis M.
; San Diego, Calif.: Academic Press, 1989.
Subject:
Plasma etching
.
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Relevance: 18.40%
Plasma treatment of textiles. Part II: Etched surface morphology of polyester filaments
.
Subject:
Plasma etching
.
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Relevance: 18.40%
Reactive ion etching of GaAs structures using BC13
.
by
Mailig, Rengie Mark D.
; Quezon City, Philippines: University of the Philippines, 2012.
Subject:
Physics
;
Ions
;
Plasma etching
.
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Relevance: 18.00%
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