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  Search result  Your search for [subject]Plasma-enhanced chemical vapor deposition returned 4 records.  
 
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  Thesis Characteristics of a plasma sputter-type negative ion source with a Zirconium target.

by Mendenilla, Alexander G.; 2000.

Subject: Plasma-enhanced chemical vapor deposition; Plasma devices.

  
     
Relevance: 42.04%
 
     
  Thesis Growth of amorphous carbon, diamond-like-carbon and diamond films via plasma-enhanced and hot-filament chemical vapor deposition.

by Lubguban, Jorge A.; 1996.

Subject: Plasma-enhanced chemical vapor deposition; Carbon -- Experiments.

  
     
Relevance: 40.95%
 
     
  Thesis Formation of SiH on silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source.

by Fernandez, Marcedon S.; 2004.

Subject: Amorphous semiconductors; Silane compounds; Hydrogen ions; Plasma-enhanced chemical vapor deposition.

  
     
Relevance: 39.28%
 
     
  Book Plasma deposition of amorphous silicon-based materials.

by Bruno, Giovanni; Boston: Academic Press, 1995.

Subject: Amorphous semiconductors -- Design and construction; Plasma-enhanced chemical vapor deposition; Silicon alloys.

  
     
Relevance: 38.88%
 
     
 
         
         
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