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  Search result  Your search for [subject]Rapid thermal processing returned 3 records.  
 
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  Book Rapid thermal processing of semiconductors.

by Borisenko, V. E., (Viktor Evgen'evich); New York: Plenum Press, 1997.

Subject: Rapid thermal processing; Semiconductors -- Design and construction.

  
     
Relevance: 21.17%
 
     
  Electronic Resource Modelling of an infrared halogen lamp in a rapid thermal system.

by Logerais, P.O.; France: Elsevier Masson SAS, 2010.

Subject: Science and technology; Infrared halogen lamp; Rapid Thermal Processing (RTP); Monte-Carlo method.

  
     
Relevance: 19.90%
 
     
  Thesis TiSi2 formation by rapid thermal processing: effects of processing on material properties.

by Amorsolo, Alberto Jr. V.; New York, USA: University of Rochester, 1996.

Subject: Engineering; Titanium silicide films; TiSi2 formation; Rapid thermal processing -- TiSi2 formation; Silicide formation.

  
     
Relevance: 16.24%
 
     
 
         
         
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