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Semiconductors -- Etching
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Parametric study of the reactive ion etching of silicon
.
by
Sotto, Romelyn H.
; 2008.
Subject:
Semiconductors -- Etching
;
Silicons -- Etching
;
Plasma etching
.
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Relevance: 22.10%
Proceedings of the Symposium on Etching for Pattern Definition
.
by
Hughes, Henry G.
; Princeton, N.J.: Dielectrics and Insulation and Electronics Divisions, Electrochemical Society, 1976.
Subject:
Semiconductors -- Etching
;
Integrated circuits -- Congresses
;
Metals -- Etching
.
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Relevance: 21.19%
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