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TiSi2 formation
returned
1
record.
TiSi2 formation by rapid thermal processing: effects of processing on material properties
.
by
Amorsolo, Alberto Jr. V.
; New York, USA: University of Rochester, 1996.
Subject:
Engineering
;
Titanium silicide films
;
TiSi2 formation
;
Rapid thermal processing -- TiSi2 formation
;
Silicide formation
.
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